Replacements for worn-out cryopump parts can be obtained as spare parts from HSR AG or through our distribution partners. Please provide the serial number on the pump housing. This should not be confused with the serial number on the cold head or the compressor.
List of most important spare parts:
- Cold heads
- 20 K panels
- 80 K shields
- 80 K baffles
- Oil adsorbers helium compressor
- Flexlines
- Indium sets
- Temperature sensors
HSR AG offers various exchange sets if a revision is planned but a complete rental system for temporary operation is not practical or available. These sets consist of refurbished parts and are in perfect operating condition:
- Cold head as exchange unit, indium set, recommended after 15,000 hours of operation
- Exchange compressor set with adsorber and flexlines, recommended after 30,000 hours of operation
- Exchange set with internal parts, consisting of 80 K baffle, 80 K shield, 20 K panel, indium set, replacement as needed
- Complete set with all mentioned parts
The shipping costs will be shared. The customer is responsible for arranging pickup of the refurbished goods at HSR AG. HSR AG will organize pickup of the used goods from the customer site.