After acquiring the well-known and proven diffusion pump technology from the former Balzers AG, HSR AG has optimized and further developed the products. Energy-saving ECO versions expand the range of diffusion pumps, which are increasingly gaining popularity during a persistent energy crisis. Our customers benefit from the longevity of these robust and low-maintenance pumps, the availability of original Balzers AG spare parts, and the highest process stability in operation.
Oil diffusion pumps are suitable for many applications in high vacuum technology where small amounts of oil residues in the vacuum chamber are acceptable. Examples include vapor deposition systems, vacuum furnaces (vacuum hardening, vacuum soldering, etc.), vacuum applications in high magnetic fields (e.g., particle accelerators), vacuum distillation of essential oils, and coating of packaging films.
Main characteristics:
- Available in sizes DN40 to DN1000
- Robust design without sensitive electronics
- High pumping capacity
- Good forevacuum resistance
- Low propellant backstreaming
- Low physical height
- Proven heating system from Balzers AG, associated with very durable heating plates, and no oil deposits due to hotspots on the inside of the pump
- Simple system without regulation of heating power
- Temperature switch or PT100 with protective tube
- Temperature protection switch for protection against overheating
Product Groups
Standard
ECO
Operating materials
