High vacuum valves are used as shut-off valves between a high vacuum pump and the vacuum chamber. Actuation is typically carried out by electropneumatics. Two electric limit switches signal the open or closed position. Throttling valves are optionally available to protect the vacuum pump from excessive gas flows. This means that the valve disc can be locked in an intermediate position to reduce the conductance. In processes with high gas loads, the throttled position is used. During time-critical chamber evacuation, the valve is fully opened to reduce waiting times between batch changes.
Product Groups
HVT
