The angle valves of the VAP series are ideally suited for use as high-vacuum valves between the chamber and a cryopump or turbopump. The proven design provides high conductance, and the well thought-out designs stands for quality and a long lifespan.
Features
- ISO-K size DN 250
- Sealed on both sides (1 bar)
- Sliding feedthrough for drive with bellows seal
- Plate and housing with O-ring seal
- High conductance due to maximum stroke
- Optical and electrical position indication
- Electropneumatic drive