ECO Diffusion Pumps

The energy-efficient ECO versions are available in sizes DN 320 to DN 1000 and offer energy cost savings of up to 45%. The heat radiation to the surrounding air is 5% of the rated power. In conventional standard diffusion pumps, the proportion is 25%.

HSR ECO diffusion pumps have been tested both in our laboratory and under practical conditions with the propellants 66A, HSR704EU, and HSR705. It has been verified that the extraordinary performance data of HSR diffusion pumps is maintained.

To achieve the maximum energy savings of 45%, the ECO pumps feature a standby function. When activated, specific heating plates at the pump’s base are turned off. This mode is primarily suitable for overnight operation with the high vacuum valve closed. Under special circumstances and with a stable process pressure below 10-4 mbar, the ECO pump in standby mode can also be operated at partial load. Our throttling angle valves are particularly well-suited for this purpose (see HVT angle valves).

For the entire size range from DN 320 to DN 1000, we also provide retrofit kits for installation at the customer’s site. All diffusion pumps of the corresponding sizes and types from BALZERS, PFEIFFER, and HSR (e.g., DIF500, DIF500A, PDA501-W, etc.) can be retrofitted on-site.

Designation PDA 320-Eco PDA 400-Eco PDA 501-Eco PDA 631-Eco PDA 800-Eco PDA 1000-Eco
Series Eco Series Eco Series Eco Series Eco Series Eco Series Eco Series
Version Cold Cap Cold Cap Cold Cap Cold Cap Cold Cap Cold Cap
HV flange DN 320 ISO-K DN 400 ISO-K DN 500 ISO-K DN 630 ISO-K DN 800 ISO-F DN 1000 ISO-F
Roughing flange DN 63 ISO-K DN 100 ISO-K DN 100 ISO-K DN 160 ISO-K DN 160 ISO-K DN 160 ISO-K
Pumping speed 4’200 l/s 6’000 l/s 9’500 l/s 15’000 l/s 23’000 l/s 40’000 l/s
Throughput 8 mbar l/s 13 mbar l/s 16 mbar l/s 18 mbar l/s 26 mbar l/s 34 mbar l/s
Forevcauum stability 0.45 mbar 0.45 mbar 0.45 mbar 0.5 mbar 0.35 mbar 0.35 mbar
Working range <1×10⁻⁷ mbar – 1×10⁻² mbar <1×10⁻⁷ mbar – 1×10⁻² mbar <1×10⁻⁷ mbar – 1×10⁻² mbar <1×10⁻⁷ mbar – 1×10⁻² mbar <1×10⁻⁷ mbar – 1×10⁻² mbar <1×10⁻⁷ mbar – 1×10⁻² mbar
Inlet temperature 20 °C 20 °C 20 °C 20 °C 20 °C 20 °C
Cooling water consumption  300 l/h 370 l/h 470 l/h 800 l/h 950 l/h 1000 l/h
Operation consumption 3.6 kW 4.45 kW 5.8 kW 8.4 kW 13.6 kW 19.2 kW
Stand-by consumption 2.4 kW 3.05 kW 4 kW 5.8 kW 9.5 kW 13.2 kW

Designation PDB 400-Eco PDB 501-Eco PDB 631-Eco PDB 800-Eco PDB 1000-Eco
Series Eco series Standard series Eco series Eco sries Standard series
Version Baffle cap Baffle cap Baffle cap Baffle cap Baffle cap
HV flange DN 400 ISO-K DN 500 ISO-K DN 630 ISO-K DN 800 ISO-F DN 1000 ISO-F
Roughing flange DN 100 ISO-K DN 100 ISO-K DN 160 ISO-K DN 160 ISO-K DN 160 ISO-K
Pumping speed 4’200 l/s 6’600 l/s 13’000 l/s 20’000 l/s 34’000 l/s
Throughput 13 mbar l/s 16 mbar l/s 18 mbar l/s 26 mbar l/s 34 mbar l/s
Forevacuum stability 0.45 mbar 0.45 mbar 0.5 mbar 0.35 mbar 0.35 mbar
Operating range <1×10⁻⁷ mbar – 1×10⁻² mbar <1×10⁻⁷ mbar – 1×10⁻² mbar <1×10⁻⁷ mbar – 1×10⁻² mbar <1×10⁻⁷ mbar – 1×10⁻² mbar <1×10⁻⁷ mbar – 1×10⁻² mbar
Inlet temperature 20 °C 20 °C 20 °C 20 °C 20 °C
Cooling water consumption 370 l/h 470 l/h 800 l/h 950 l/h 1000 l/h
Operation consumption 4.45 kW 5.8 kW 8.4 kW 13.6 kW 19.2 kW
Stand-by consumption 3.05 kW 4 kW 5.8 kW 9.5 kW 13.2 kW